| 摘要 |
PURPOSE:To make it possible to measure three-dimensional mechanical quantities highly accurately with high resolution without contact with a body to be measured, by forming reference light and light to be measured based on the output light from a light source. CONSTITUTION:Coherent light from a laser light source 1 is made to be parallel light through lenses 11 and 12, sequentially transmitted to polarization beam splitters PBSs 21-24, and divided into a vertical-component wave S and a horizontal-component wave P. The S wave from the PBS21 is projected on a diffusing surface 50 of a target 5 through a lambda/2 plate 42. Three-dimensional quantities to be measured are imparted to the target 5. A speckle pattern is formed on light receiving surfaces of X-axis and Y-axis sensors 8x and 8y, based on the reflected light from the diffusing surface 50 through the PBSs 21 and 22, a mirror 33, a lambda/4 plate 44, and the PBS23. Based on the light component in a (z) system, interference fringes with the reference light from a mirror 32 are formed on a receiving surface of a sensor 8z through a stop 62 and the PBS24. The movement of the interference fringes is detected, and the mechanical quantities in the directions of three-dimensional axes are measured. |
