| 摘要 |
PURPOSE:To improve the ion beam drawing performance from an ion source by constructing the output voltage of a high speed switch to produce the prescribed voltage dividing ratio even by not only a resistor but a capacitor. CONSTITUTION:A capacitor 13 is connected at a high speed switch 4 side from a surge block core 7 between a lead electrode terminal 9 and a ground electrode terminal 10, and constructed so that the voltage dividing ratio of floating capacities 11, 12 and the position of a leading electrode terminal 9 determined by the capacitor 13 becomes equal to the voltage dividing ratio determined by the resistors 5, 6. When a high speed switch 4 is closed, the potential of the terminal 9 becomes the potential divided by the prescribed ratio from the potential of a lead-out electrode terminal 8. |
