| 摘要 |
PURPOSE:To provide a titled device which eliminates the formation of wrinkles owing to the thermal expansion of a base body and has excellent productivity by the constitution in which plural targets are justaposed along the moving route for the base body and a desired thin film is formed on the base body by adjusting the moving speed of the base body. CONSTITUTION:A thin film is formed on a long-sized base body 1 which is moved along a guide roll 2, a can 4 and a guide roll 3 in a sputtering device of a continuous producing device for a thin film by juxtaposing targets 6a-e along the moving route of said base body, connecting a high frequency or DC power source thereto, inducing glow discharge in an Ar gaseous atmosphere, and bringing the atoms scattering from the targets 6a-e into collison against the surface of said body 1 through the window of a sticking preventive plate 5 to stick the atoms thereon. The setting of the moving speed of the body 1 at a high speed is made possible so as to obtain a desired thin film while the body 1 passes the front faces of the targets 6a-e, by which the temp. gradient of the body 1 is made gentle, the formation of wrinkles owing to the thermal expansion of the base body is eliminated and the thin film having good quality is obtd. The moving speed of the body 1 is increased and productivity is improved. |
