| 摘要 |
PURPOSE:To prevent the rapid variation of air flow and provide the stable supplying of air having the high degree of cleanness by a method wherein the relative humidity of air flowing into HEPA filter is sensed, a humidifier is arranged before or after the heater device so as to adjust the relative humidity of air. CONSTITUTION:The power of refrigerating and dehumidifying operation in a refrigerating and dehumidifying device 3 is set under a condition in which any temperature and humidity of fed air 8 are applied and the relative humidity of refrigerated and dehumidified air becomes a desired humidity, for example 40RH% or less. It is humidified by a humidifier 13 and is adjusted such that a relative humidity of air flowing into HEPA filter is, for example, 50RH%. In case that a heating device 4 is turned on or off, the relative humidity of air flowing into HEPA filter is rapidly varied accordingly. However, a valve for supplying humidifying steam is controlled for its on or off condition by a relative humidity sensor device 9 to prevent a rapid variation of relative humidity.
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