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经营范围
发明名称
GAS PLASMA PROCESSOR
摘要
申请公布号
JPS59159532(A)
申请公布日期
1984.09.10
申请号
JP19830031077
申请日期
1983.02.28
申请人
DORAITETSUKU INC
发明人
JIYOSEFU EE MAHAA JIYUNIA;AASAA DABURIYU ZAFUIROPOURO
分类号
H01L21/302;C23F4/00;H01J37/32;H01J37/34;H01L21/00;H01L21/3065;H01L21/677
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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