| 摘要 |
PURPOSE:To obtain a gate valve for vacuum enabled to be opened and closed in a short time, by supplying a pressurized medium into a cavity part so as to inflate a small thickness part and jointing a disc to a protrusive stripe. CONSTITUTION:A pressurized medium is supplied into a cylinder 6 from an injection and discharge port 5, and a piston 7 is moved to a position where a disc 1 is places to be oppositely faced to a protrusive stripe 2 in the part of a supply port 10. Next, if the piston 7 is stopped, the pressurized medium in the cylinder 6, pressing the piston 7, applies the pressure to a cavity part 1a of the disc 1 through communication holes 9 and 9a. This pressure elastically displaces a small thickness part 1b to be jointed to the protrusive stripe 2. After jointing, the small thickness part 1b, continuing its elastic displacement so as to generate the action tending to force the protrusive stripe 2 to be spread, air- tightly holds the jointed part. Next, if the injection and discharge port 5 is opened, the pressurized medium is released, unjointing the small thickness part 1b from the protrusive stripe 2. |
