| 摘要 |
PURPOSE:To refine and recover efficiently Ar without difficulty in the construction of a device and utilities by subjecting the gas obtd. by a combustion treatment of titled waste gas to an adsorption treatment with adsorbents. CONSTITUTION:The waste gas contg. Ar, CO, CO2, N2, O2, H2 and moisture generated from an Ar and O2 blowing furnace is introduced into a contact combustion device 24 where the above-described H2 is converted into moisture by a catalytic reaction. Said O2 is consumed by the catalytic reaction in this stage but when the O2 is not enough for combustion, the O2 is replenished from a pipe 32. Platinum, etc. are used for the catalyst and the catalyst is adjusted to the temp. at which H2 can be selectively burned as compared to the coexisting CO. After the waste gas is pressurized with a compressor 27, the gas is cooled to an ordinary temp. and is introduced into adsorption columns 21-23 packed therein with the adsorbents which adsorb selectively moisture, CO2, N2, and CO as compared to Ar. The Ar refined in the adsorption treatment by the adsorption method with the fluctuating pressure using said columns is introduced into a product tank 28. |
