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发明名称
摘要
申请公布号
JPS5936830(B2)
申请公布日期
1984.09.06
申请号
JP19770031667
申请日期
1977.03.24
申请人
FUIRITSUPUSU FURUUIRANPENFUABURIKEN NV
发明人
JON MAACHIN SHANON
分类号
H01L27/06;H01L21/331;H01L21/8222;H01L27/00;H01L29/70;H01L29/73;H01L29/861;H01L29/866
主分类号
H01L27/06
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