| 摘要 |
PURPOSE:To manufacture economically silicon tetrachloride with high operation efficiency when silicon tetrachloride is manufactured by reacting ferrosilicon or the like with chlorine, by feeding the ferrosilicon or the like by a specified system. CONSTITUTION:A starting material such as silicon contg. iron as an impurity or ferrosilicon is fed to a reactor, and while passing chlorine, the starting material is reacted with chlorine at 350-1,000 deg.C to manufactue silicon tetrachloride. In accordance with the progress of the reaction, iron, ferror chloride, etc. are gradually accumulated in the reactor, so the feed of the starting material is suspended, and only chlorine is passed to convert the accumulated components into gaseous ferric chloride. The gaseous ferric chloride is exhausted from the reactor. The starting material is fed again before the internal temp. of the reactor lowers to <=300 deg.C and the reaction for synthesizing silicon tetrachloride is initiated again.
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