| 摘要 |
PURPOSE:To prevent a pressure sensor from destruction even when excessive pressure is applied by a method wherein stoppers are provided on the upper and lower sides of the diaphragm of the pressure sensor. CONSTITUTION:A cavity 2 is processed to the back of an Si single crystal disc 1 to form a diaphragm 1a and a stationary part 1b, and semiconductor distortions 3 are formed on the surface of the diaphragm 1a. A stopper 5 is joined on the stationary part 1b as to have a gap between the thin-wall part. A stopper 6 is joined under the stationary part 1b as to have a gap between the diaphragm 1a. According to construction thereof, when excessive pressure to exceed the pressure measurement extent is applied, the diaphragm 1a strikes against the stopper 5 or the stopper 6 to be stopped thereat. Accordingly, the sensor can be prevented from destruction according to excessive pressure. |
