发明名称 Method for crystallizing films
摘要 There is described a method for crystallizing films selected from the group comprising the amorphous elementary semi-conducting films and the polymetallic films comprised of two elements belonging respectively to Groups III and V, or Groups II and VI of the Periodic Table, which comprises irradiating the film surface with a laser beam guided by an assembly from optic fibers which are arranged in parallel relationship with one another, each fiber having a diameter which is not larger than 50 mu , said irradiating causing crystallizing into crystallites which are regularly distributed and closely confined.
申请公布号 US4469551(A) 申请公布日期 1984.09.04
申请号 US19810302753 申请日期 1981.09.16
申请人 L'ETAT BELGE, REPRESENTE PAR LE SECRETAIRE GENERAL DES SERVICES DE LA PROGRAMMATION DE LA POLITIQUE SCIENTIFIQUE 发明人 LAUDE, LUCIEN D.
分类号 H01L31/04;B23K26/00;C30B1/02;C30B1/08;C30B21/02;C30B29/02;C30B29/40;C30B29/48;H01L21/20;H01L21/268;(IPC1-7):C30B1/04 主分类号 H01L31/04
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