Piezoelectric vibrator device including vibrator element and frame of unitary construction

摘要

A piezoelectric vibrating device comprises a vibrating element supported by a support frame through at least two arms with the support frame surrounding the vibrating element. The vibrating element, the support frame and the support arms are of one-piece construction fabricated from a sheet of temperature-stable metal of constant elasticity. A ZnO layer is formed so as to overlay the vibrating element and also a portion of the support frame, and electrodes are formed so as to overlay a part of the ZnO layer on the vibrating element and another part of the ZnO layer on the support frame, respectively. One of the electrodes on the other part of the ZnO layer cooperates with the metal of constant elasticity to define a static capacitance with the ZnO layer serving as a dielectric body. An aluminum layer is interposed between the ZnO layer and the vibrating element.