| 摘要 |
A measuring set-up is provided which serves for determining the surface profile of an object (13) by measuring the distance between a point on the object (13) and a reference point and by sequential repetition of these measurements. The set-up contains a light source (10), which transmits a thin light beam, a first optical system (11, 19), which guides the light beam to the object (13) in order to produce a point (S1) of light thereon, and a second optical system (11, 23) for guiding the light reflected from the point (S1) of light to a light-sensitive detector (15). The measuring set-up further contains devices (11) which are contained in the first optical system (11, 19) and which focus the light beam on the optical axis (20) of the system, devices (22) for displacing the focal point along the optical axis (20), deflecting devices (21) for deflecting the beam in such a way that the point of light moves on the object (13) or onto the optical axis (20), devices (24) for determining the distance (Zt) between the reference point and the focal point (f) on the optical axis (20) of the first optical system (11, 19), and devices (24) for determining the distance (zd) between the object (13) and the focal point (f) from the distance of the deflection of the light beam from the point of intersection of the light beam with the optical axis on the surface of the object and ... Original abstract incomplete. <IMAGE> |
