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发明名称
摘要
申请公布号
DE2644597(C2)
申请公布日期
1984.08.30
申请号
DE19762644597
申请日期
1976.10.02
申请人
PHILIPS PATENTVERWALTUNG GMBH, 2000 HAMBURG, DE
发明人
SONNENBERGER, PAUL, DIPL.-ING., 2000 HAMBURG, DE
分类号
G01K7/01;(IPC1-7):G01K7/22;H01L23/56
主分类号
G01K7/01
代理机构
代理人
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