发明名称 ION PLATING WITHOUT THE INTRODUCTION OF GAS
摘要 A process for ion plating wherein plating material is melted, vaporized, and then subjected to an ionization environment within a vacuum chamber, to create a plasma of ionized atoms by evaporating in the radio frequency field, and the process for plating such ionized material onto a substrate in the absence of any gas, inert or otherwise. It is an ion plating process without the need of an inert gas plasma wherein a high particulate energy is given to ionized particles of a plating material thus composites film build up representing a layer atomically bonded to the substrate carrier material.
申请公布号 DE3165070(D1) 申请公布日期 1984.08.30
申请号 DE19813165070 申请日期 1981.08.29
申请人 WADA, AYAO 发明人 WADA, AYAO
分类号 C23C14/32;H01L21/203;H01L21/31;(IPC1-7):C23C15/00 主分类号 C23C14/32
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