发明名称 |
INGAASP ON INP SUBSTRATE CORRUGATION |
摘要 |
A method of growing an InGaAsP layer on a corrugated InP substrate as a part of a procedure for producing a DFB semiconductor laser includes the step of heating the substrate up to temperatures approaching 700 DEG C. while holding the substrate in an atmosphere which contains arsine and phosphine. The substrate is subsequently moved to InGaAsP and InP growth chambers for growth of these respective layers. The method of the invention is advantageous in that the corrugated structure of the substrate is maintained intact throughout the procedure. |
申请公布号 |
GB8419247(D0) |
申请公布日期 |
1984.08.30 |
申请号 |
GB19840019247 |
申请日期 |
1984.07.27 |
申请人 |
NEC CORPORATION |
发明人 |
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分类号 |
C30B19/12;C30B25/02;C30B25/12;C30B25/18;H01L21/20;H01L21/205;H01L21/208;H01S5/00;H01S5/12;H01S5/323 |
主分类号 |
C30B19/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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