| 摘要 |
PURPOSE:To perform cooling and heating under uniform temperature distribution, by internally mounting one end of a cooling and heating device into a tightly-closed heat emitting and absorbing body, sealing a heat medium, which is different from a medium in the tightly-closed heat emitting and absorbing body, into the cooling and heating device, and heating and cooling the other end of the cooling and heating device. CONSTITUTION:In vacuum evaporation, a tightly-closed heat emitting and absorbing body 3 is rotated, a heater 6 is conducted, and a material to be evaporated 2 is evaporated at a high temperature. Thereafter one end of a cooling and heating device 12 is made to pierce through a bell jar 1. A refrigerant 14 is jetted to a cooling part 12a of the cooling and haeting device 12 from a nozzle 15, and the entire cooling and heating device 12 from a nozzle 15, and the entire cooling and heating device 12 is uniformly cooled from the inside. A high-temperature heat medium 5 in the tightly-closed heat emitting and absorbing body 3 is cooled, and the entire tightly-closed heat emitting and absorbing body 3 is cooled from the inside. The material to be evaporated 2 is cooled by the heat medium 5 and a heat medium in the cooling and heating device 12, whose boiling point is lower than that of the heat medium 5. Therefore, the material to be evaporated 2 in the high temperature state can be efficiently cooled under uniform temperature distribution. |
