| 摘要 |
PURPOSE:To easily detect a surface defect, by detecting the reflective state of laser beam on the surface of the object having a spherical or cylindrical surfaces. CONSTITUTION:In a surface inspecting apparatus 10, an object (inner race) W to be inspected is attached to the attachment 44 of a drive means 40 and rotated at a predetermined speed by an electromotor 43. On the other hand, when laser beam is generated by a laser oscillator 20, the laser beam condensed by a condensing means 30 scans the surface of the matter W to be inspected during rotation. The reflected beam from the surface of the matter W is incident to a beam-electricity converting element 35 through a beam splitter 33 and converted to an electric signal. This electric signal is outputted as a gentle wavy signal corresponding to the eccentric rotation of the object W to be inspected and, when a defect is present on the surface of the object to be inspected, generated as a sharp rising signal by reception of the large change of reflected beam. |
