发明名称 Silicon ribbon growth wheel and method for surface temperature profiling thereof
摘要 A silicon ribbon growth wheel having an internal cooling fluid contacting surface modified to provide a lateral temperature profile on the wheel surface of lower temperature near the wheel edges. In a preferred form the inner surface is provided with grooves near the wheel edges to increase heat conduction to the cooling fluid at the wheel edges. A method for surface temperature profiling the growth wheel is also disclosed. A method for surface temperature profiling the growth wheel is also disclosed.
申请公布号 US4468280(A) 申请公布日期 1984.08.28
申请号 US19820453690 申请日期 1982.12.27
申请人 ATLANTIC RICHFIELD COMPANY 发明人 BENDER, DAVID L.;REA, SAMUEL N.
分类号 C30B11/00;(IPC1-7):C30B19/02;C30B29/06;C30B35/00 主分类号 C30B11/00
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