发明名称 |
Silicon ribbon growth wheel and method for surface temperature profiling thereof |
摘要 |
A silicon ribbon growth wheel having an internal cooling fluid contacting surface modified to provide a lateral temperature profile on the wheel surface of lower temperature near the wheel edges. In a preferred form the inner surface is provided with grooves near the wheel edges to increase heat conduction to the cooling fluid at the wheel edges. A method for surface temperature profiling the growth wheel is also disclosed. A method for surface temperature profiling the growth wheel is also disclosed.
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申请公布号 |
US4468280(A) |
申请公布日期 |
1984.08.28 |
申请号 |
US19820453690 |
申请日期 |
1982.12.27 |
申请人 |
ATLANTIC RICHFIELD COMPANY |
发明人 |
BENDER, DAVID L.;REA, SAMUEL N. |
分类号 |
C30B11/00;(IPC1-7):C30B19/02;C30B29/06;C30B35/00 |
主分类号 |
C30B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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