发明名称 |
Electron microscope equipped with measuring facility |
摘要 |
Electron microscope imparted with measuring functions comprises an electron microscope system for forming an electron-microscopic image, a fluorescent screen for displaying the electron-microscopic image, and an optical microscope for observing the electron-microscopic image on the fluorescent screen. A pattern which provides convenience for measurements of the electron-microscopic image is imaged on an object plane of an eyepiece of the optical microscope.
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申请公布号 |
US4468560(A) |
申请公布日期 |
1984.08.28 |
申请号 |
US19820348018 |
申请日期 |
1982.02.11 |
申请人 |
HITACHI, LTD.;NISSEL SANGYO AMERICA, LTD. |
发明人 |
KUBOZOE, MORIOKI;SATOW, HISASI;JOHNSON, JR., JOHN E. |
分类号 |
G01B9/04;G01B11/02;H01J37/22;(IPC1-7):G01N23/04 |
主分类号 |
G01B9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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