| 摘要 |
PURPOSE:To make it possible to grow a good compound semiconductive membrane, by providing a third blow-out port for blowing out gas containing no stock material between a first and a second blow-out ports each for blowing stock gas so as to surround the first blow-out port. CONSTITUTION:In a nozzle for synthesis of a compound semiconductive membrane for carring out the growth of the compound semiconductive membrane on a semiconductive substrate provided in a reaction vessel by supplying a gas phase stock material, a blow-out port 11 for blowing out a first kind of stock gas such as an organometallic compound, a blow-out port 13 for blowing out a second kind of stock gas such as a hydride and a blow-out port 12 which is arranged between the blow-out port 11 and the blow-out port 13 so as to surround the blow-out port 11 and blows out gas containing no stock material such as hydrogen gas are provided. That is, the mutual diffusion of the first kind of the stock gas and the second kind of the stock gas in a gaseous state is controlled by the gas stream containing no stock material to suppress the formation of an intermediate reaction product. Therefore, the compositional control of the obtained crystal membrane becomes extremely easy and the crystallinity of the obtained crystal membrane can be further remarkably enhanced. |
