| 摘要 |
<p>PURPOSE:To make it possible to perform stable trimming and to improve a yield rate, by making trimming sensitivity constant. CONSTITUTION:An adjusting resistor, which is provided in a semiconductor circuit 1, is cut. The output of the semiconductor circuit at this time is measured. Based on the number of sheets of the cut adjusting resistor as a designed value and the change in measured value, the resistance value of an actual sheet is computed. Based on the obtained resistance value of the sheet, the output of the semiconductor circuit is computed and predicted when the adjusting resistor in the next stage is cut. Three processes are repeated and the required adjustment is carried out. Namely, power is supplied to the semiconductor circuit (IC chip) from a probe board 5, a measuring instrument 9 and the like, and the output value of the IC is measured. A CPU 11 controls a laser generator 13, a mirror 17 and the like in correspondence with the measured value, selects the suitable adjusting resistor and trims the resistor.</p> |
