发明名称 FORMATION OF CURVED LIGHT-TRANSMITTING MASK
摘要 PURPOSE:To enable a photomask with high acuracy to be easilyh obtained by trimming an opaque film formed on one surface of a curved light-transmitting plate by means of laser light so as to obtain a given mask pattern. CONSTITUTION:A curved light-transmitting plate 6 is formed which optically corresponds to the inner surface of spherical plate 2 of a picture tube. Next an opaque film 6 is formed on one surface of the curved light-transmittng plate 5 which faces the inner surface 2a of the face plate 2 during exposure. The opaque film 6 is homogeneously formed over the entire surface for example by vacuum- vapordepositioning a metal such as chromium, aluminum, copper or nickel. After that, the opaque film surface of the curved light-transmitting plate 5 is subjected to trimming by irradiating laser light 7 on the opaque film 6 while controlling a work table which can be triaxially driven in the same manner as when a given mask pattern is obtained by laser light.
申请公布号 JPS59149627(A) 申请公布日期 1984.08.27
申请号 JP19830024429 申请日期 1983.02.15
申请人 SANYO DENKI KK 发明人 HINOTANI KATSUHIRO;KAWAMORI MASATAKE;MIWA KOUJI;HAYAMA HIROSHI
分类号 H01J9/14;H01J9/227 主分类号 H01J9/14
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