| 摘要 |
PURPOSE:To detect a thickness distribution continuously by allowing linear image sensors to detect conveyance-directional irradiation positions of a red and a blue laser beam over a breadthwise scan on a sheet-like body to be inspected. CONSTITUTION:While the blue laser beam 2 and red laser beam 3 are scanned breadthwise on the sheet-like body 1 to be inspected, the coveyance-directional irradiation positions of both laser beams are detected by the linear image sensors 9 and 10; the breadthwise thickness distribution of this sheet-like body 1 to be inspected is inspected continuously because the difference output is compared with a critical reference value, and the scanning speed is increased easily because movable parts are only mirrors 4 and 5 for scanning the beams, thereby increasing the inspection speed. Further, thickness defects are detected over the entire surface of the sheet-like body 1 to be inspected by the scanning of the beams and the conveyance of the sheet-like body 1 to be inspected. |
