| 摘要 |
PURPOSE:To turn a sample up to a desired angle simply and in a short time by turning a mark to be displayed on the screen by an optional angle and turning automatically a rotary mechanism up to the angle of said mark. CONSTITUTION:A signal of a detector 13 detecting the secondary electrons generated from a sample 5 due to irradiation by electron rays 6 is fed to the cathode of a cathode-ray tube 12. Pulse motors 16I and 16R driving a tilt mechanism 2 and a rotary mechanism 4 as well as the pulse motors 16X and 16Y driving X and Y shifting mechanisms are controlled by a control device 18. The control device 18 generates a bright line display signal on the screen of the cathode-ray tube 12 basing on the signal to be fed from a scanning signal generation circuit 10. The input device 19 is provided with a bright line rotating knob 19a for turning the bright line to be displayed on the screen of the cathode-ray tube 12 on said screen, a rotation instruction button 19b instructing to turn the sample by the rotation mechanism 4 up to the indicated angle of the bright line, a sample tilting knob 19c specifying the tilt angle by the tilt mechanism 2 and the buttons 19xa-19yb shifting the sample in the directions X and Y by the XY shifting mechanism 3. |
