| 摘要 |
PURPOSE:To arrange functional devices with high density by forming a superconductor layer and an isolation layer on an insulating substrate, forming a coating layer on an uppermost layer and forming a circuit containing a Josephson junction on the coating layer. CONSTITUTION:Superconductor layers 32, 33 patterned for wirings extending over two layers are disposed on an insulator substrate 31. An isolation layer consisting of an insulator layer 35, a superconductor layer 36, an insulator layer 37 interposes between the layers 32 and 33. The layer 33 is coated with a coating layer composed of an insulator layer 38, a superconductor layer 39 and an insulator layer 40. Patterned superconductor layers 44-46 and a resistor layer 34 and the like are arranged on the coating layer. An oxide film barrier 47 interposes between the layers 44 and 45 to constitute a Josephson junction consisting of a superconductor, the oxide film barrier and a superconductor. A functional device is constituted by combining these superconductor layers, Josephson junction, resistor, etc. According to such constitution, the function devices can be disposed with high density.
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