| 摘要 |
PURPOSE:To improve the corrosion resistance of a lower electrode by constituting at least one part of the lower electrode by a compound of a transition metal and Si, a transition metal and nitrogen or a transition metal and carbon. CONSTITUTION:A heat-resistant resin film 2 is formed on the surface of a substrate 1 having heat-resisting property. Lower electrodes 3a-3e consisting of a compound of a transition metal and Si are formed on the substrate 1. An amorphous Si film 4 is formed on the film 2 on which the electrodes 3a-3e are shaped. Light-transmitting upper electrodes 5a-5e are formed on the film 4 opposite to the electrodes 3a-3e. An SiO2 film 6 as a passivation and an antireflection is formed on the electrodes 5a-5e. According to such constitution, the generation of the corrosion, exfoliation, etc. of the electrodes is prevented while inhibiting the secular deterioration of an output. |
