| 摘要 |
PURPOSE:To obtain high-purity sialon powder having fine particle diameter arranged in order, a uniform composition and good sinterability, by allowing halogenated silicon or silane and halogenated aluminum to react with water, oxygen and ammonia at the same time in a vapor phase. CONSTITUTION:Halogenated silicon and/or silane and halogenated aluminum are allowed to react with water and/or oxygen and ammonia under heating in a vapor phase. The product is heated in a stream of an inert gas and/or ammonia to remove chlorine components. The feeding quantities of halogenated silicon and/or silane, halogenated aluminum, water and/or oxygen and ammonia are different according to the reaction temp. and the reaction time, however, it is desirable to have excessive feeding quantities of halogenated aluminum and ammonia than quantities calculated from the element ratio of a desired sialon composition. |
