| 摘要 |
PURPOSE:To obtain the titled recording head which is improved in reliability, yield and others and is excellent in durability by a method wherein an electroconductive material forming electrodes is partly changed in quality into an inorganic insulating material forming an inter-electrode separation layer which is provided in a part other than electrode portions on a heating resistance layer. CONSTITUTION:A thermal ink jet substrate 202 is composed of a supporting body 206 formed of silicon or the like, a lower layer 207 formed of SiO2 or the like, a heating resistance layer 208, an inter-electrode separation layer 214 covering a part other than electrodes 209 and 210 and electrode portions along a liquid flow channel 204, and upper layers 216 and 217 formed of an inorganic material. An electroconductive material forming the electrodes is partly changed in quality into an inorganic material, of which the inter-electrode separation layer 214 is formed. Regarding a quality-changing method, it is preferable to change the pertinent part of the electroconductive material into an oxide by an anodizing method. The deterioration in durability caused by any defect of a protection layer (SiO2 layer) can be eliminated by forming on the electrode portions a layer whose quality is changed as described above. |
