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发明名称
CONTROLLING SPUTTER COATING
摘要
申请公布号
GB8418029(D0)
申请公布日期
1984.08.22
申请号
GB19840018029
申请日期
1984.07.16
申请人
VARIAN ASSOCIATES INC
发明人
分类号
C23C14/36;C23C14/35;C23C14/54;H01J37/34;(IPC1-7):C23C15/00
主分类号
C23C14/36
代理机构
代理人
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地址
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