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发明名称
ELLIPSOMETERS
摘要
申请公布号
EP0091545(A3)
申请公布日期
1984.08.22
申请号
EP19830101543
申请日期
1983.02.18
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CHASTANG, JEAN-CLAUDE ANDRE;HILDENBRAND, WALTER WILLIAM;LEVANONI, MENACHEM
分类号
G01J4/04;G01N21/21;(IPC1-7):G01N21/21
主分类号
G01J4/04
代理机构
代理人
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