MAGNETRON SPUTTER COATING SOURCE,申请号GB19840018028-传众专利搜索

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发明名称	MAGNETRON SPUTTER COATING SOURCE
摘要
申请公布号	GB8418028(D0)	申请公布日期	1984.08.22
申请号	GB19840018028	申请日期	1984.07.16
申请人	VARIAN ASSOCIATES INC	发明人
分类号	H01J9/02;C23C14/35;C23C14/36;H01J23/027;H01J37/34;(IPC1-7):C23C15/00	主分类号	H01J9/02
代理机构		代理人
主权项
地址

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