| 摘要 |
PURPOSE:To produce a recording medium which excels in the corrosion resistance of a magnetic layer by forming a recording magnetic layer on a substrate under vacuum, a thin film of a metal or an oxide contacting to the recording magnetic layer without breaking the vacuum state and then a protecting film in another vacuum tank. CONSTITUTION:An amorphous recording magnetic layer is formed on a substrate by sputtering under vacuum. Then a thin film of a metal or an oxide is formed with about 200Angstrom thickness on said recording magnetic layer in the same vacuum tank by sputtering without breaking the vacuum state. In this case, the metal uses Ti, Al, Si, Cr, etc,; while the oxide uses TiO2, Al2O3, SiO2, CrO3, etc. Then a protecting film of 2,000-3,000Angstrom thickness is formed on the thin film in another vacuum tank. This protecting film can use a material same as or different from the thin film. Thus said thin layer is previously formed on the recording magnetic layer in the same vacuum tank without breaking the vacuum state of the tank where the recording magnetic layer is formed when the protecting film is formed. |
