| 摘要 |
PURPOSE:To reduce bending and distortion even with polarization taken place by making the thickness of electrodes of a piezoelectric porcelain device thin sufficiently in comparison with the piezoelectric porcelain device and porividing fitting strength sufficiently only for the part being an input/output terminal of a part of lead of the electrodes. CONSTITUTION:The thin piezoelectric porcelain device 1 is sticked to a thin metallic plate 2 and electrode 3, 4, 5 are formed on the surface of the piezoelectric porcelain device 1 with baking silver electrode. The thickness of the electrodes 3, 5 is <=1mu and the thickness of the piezoelectric porcelain device 1 is 100mu. Further, the thickness of the electrode 4 is >=2mu. That is, the electrode 3 becomes an electric connecting section between the electrode 4 being an extracting section of the input/output lead and the piezoelectric porcelain, and the electrode 5 is the electric and mechanical connecting section to the metallic plate 2. In forming the electrodes 3-5 by the screen printing, the part of the electrode 4 is formed thick by changing the mesh of a part of the electrode screen. Moreover, in using vapor-deposition or plating, the electrodes 3, 5 are formed by vapor deposition or plating on an entire face and the electrode 4 is formed by applying plating or vapor deposition only at a part again. |
