| 摘要 |
PURPOSE:To assure the formation of a window part and to improve the workability for insertion of winding as well as the mass productivity for a ferromagnetic thin film which forms a core, by facilitating the setting of thickness and formation of a magnetic gap of the ferromagnetic thin film by attaching said thin film to a nonmagnetic reinforcement substrate by a sputtering process, etc. and furthermore deleting the undesired glass melt-stuck material. CONSTITUTION:A ''Sendust'' alloy thin film 3 containing 5-7wt% Al and 8- 10wt% Si and Fe is attached on the upper surface including the inner surface of a cut groove 2 in an Ar atmosphere of about 10<-2> Torr by a high frequency sputtering method. Such a film 3 functions as a ferromagnetic core. Then the resist is coated on the surface of the film 3 by a spinner, and the masking is performed by the hotolithographic technique. Then an SiO27 is stuck onto the glass 1', 1'... having high melting pints and thin films 5, 5... by a sputtering process in the form of a gap spacer. The glass 4' of a low melting point is filled into a gap between a substrate 10 and a thin film 8 to perform heating and press-contact. At the same time, the glass 4' is eliminated to form a window part 11. |
