| 摘要 |
PURPOSE:To obtain a thermal flow sensor which can be manufactured easily and can measure all the conduction heat quantity by placing a material which is capable of moving a liquid by capillarity, on a coating material of the surface and the rear side of a rectifying sensor. CONSTITUTION:A filter paper 11 is stuck to the part extending from a rear side 10a of a thermal flow senser 10 to a surface 10c through one end side face. Water which becomes a watedrop on the rear side 10a by the filter paper 11 moves to the surface 10c by capillarity, and can be moved on the surface side. The thickness of the filter paper 11 is made thin enough to <=100mum so that influence is not exerted on a heat conductance C of the thermal flow sensor 10. A dummy 12 is made of black silicone rubber having the same quality of material as the coating material, and prevents water from evaporating from one end 10b of the sensor 10. In this way, water which becomes a waterdrop on the rear side 10a of the sensor 10 can be evaporated from the surface 10c, therefore, all the conduction heat quantities can be measured. |
