发明名称 |
Ebulliometric hot spot detector |
摘要 |
An ebulliometric hot spot detector detects hot spots with a resolution of the order of a micron on semiconductor devices. The device to be tested is operated in a suitable liquid contained in the detector, and the liquid pressure is decreased until boiling from sites on the device is observed. The liquid pressure is then increased until boiling ceases; meanwhile, the boiling sites on the device are observed. Small bubbles observed just before cessation of boiling pinpoint the hot spot locations. The pressure at which boiling ceases in a given liquid determines the hot spot temperature.
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申请公布号 |
US4466746(A) |
申请公布日期 |
1984.08.21 |
申请号 |
US19810326224 |
申请日期 |
1981.12.01 |
申请人 |
HANCOCK, ROBERT D. |
发明人 |
HANCOCK, ROBERT D.;HOLLMAN, KENNETH F. |
分类号 |
G01K11/02;F16J3/04;G01N25/08;G01N25/72;G01R31/26;(IPC1-7):G01N25/72 |
主分类号 |
G01K11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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