发明名称 |
Three plate silicon-glass-silicon capacitive pressure transducer |
摘要 |
A three plate silicon-glass-silicon capacitive pressure transducer includes a conductive silicon diaphragm and substrate relatively spaced by a dielectric body having disposed therein a central electrode positioned between the diaphragm and substrate to form a pressure responsive capacitance with the diaphragm at a value inversely proportional to a pressure signal applied to a pressure sensing surface of the diaphragm.
|
申请公布号 |
US4467394(A) |
申请公布日期 |
1984.08.21 |
申请号 |
US19830527531 |
申请日期 |
1983.08.29 |
申请人 |
UNITED TECHNOLOGIES CORPORATION |
发明人 |
GRANTHAM, DANIEL H.;SWINDAL, JAMES L. |
分类号 |
G01L13/02;G01L9/00;G01L9/12;H04R19/04;(IPC1-7):H01G7/00 |
主分类号 |
G01L13/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|