发明名称 |
Electron beam drilling apparatus |
摘要 |
An electron beam drilling apparatus for drilling a number of holes in a substrate by an electron beam is disclosed. The holes are drilled at a high speed by scanning the electron beam along a direction perpendicular to the direction of movement of the workpiece while the workpiece is moved at a high speed. A drilling position error due to the high speed movement of the workpiece is corrected by controlling an electron beam deflection unit and an electron beam generator.
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申请公布号 |
US4467170(A) |
申请公布日期 |
1984.08.21 |
申请号 |
US19820387666 |
申请日期 |
1982.06.11 |
申请人 |
HITACHI, LTD. |
发明人 |
HATA, SEIJI;TERABAYASHI, TAKAO;ARAKAWA, NORIYOSHI;WATANABE, MAKOTO |
分类号 |
B23K15/00;B23K15/08;(IPC1-7):B23K27/00 |
主分类号 |
B23K15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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