| 摘要 |
PURPOSE:To obtain a recording medium for high density information which excels in low frictional property, traveling stability, corrosion resistance, durability, etc. by providing a phosphated metallic thin film for a magnetic recording layer without deteriorating the magnetic characteristics on the surface of a magnetic layer. CONSTITUTION:A medium obtained by vapor-depositing obliquely a magnetic layer of Co-Ni, etc. on a base film of polyester, etc. is wound up to a tape-up roll 10 from a feed roll 9. At the same time, the gaseous phosphate of PH3, etc. is supplied within a reaction container R, for example, from a gas source 1 and mixed with the gas supplied from a gaseous carrier source 2 by a mixer 5 via mass flow controllers 3 and 4. Then a high frequency power supply 6 is turned on to plasma phosphate the surface of the magnetic layer below about 100Angstrom thickness by means of electrodes 7 and 7'. As a result, the magnetic layer has the corrosion resistance to maintain high traveling stability and high durability for a long period of time. In addition, the reduction of output due to a spacing loss can be avoided since no top coat, etc. is provided to the surface of the magnetic layer unlike a conventional case, and also the characteristic deterioration due to heat is prevented owing to a phosphating process carried out with low temperature plasma. This improves the performance of a high density recording medium. |
