| 摘要 |
PURPOSE:To obtain a liquid metal ion source which can prevent melting of a current introducing terminal or the stop screw of a heater by electrically connecting the heater to the current introducing terminal through a thermal conduction limiting means which limits thermal conduction to the current introducing terminal from the heater. CONSTITUTION:In the figure 12, 12' are conductive spacers characterizing this invention. A current is applied to a heater 1 from a heating power supply 9 in order to set the heater 1 at a temperature of 1,200 deg.C which is higher than the melting point of nickel-boron alloy by about 200 deg.C and the heater is maintained at this temperature for a long period, a high intensity field is formed at the end of chip 6 by supplying a high voltage between the chip 6 and electrode 5 through a material 2 to be ionized from a leadout power supply 10, the ion of material 2 to be ionized is extracted from the end of chip 6 and the accelerated ion beam 7 is extracted by the acceleration power supply 11. In this case, the current introducing terminal 3 and stop screw 4 are not melted and stabilized ion beams of Ni and B can be extracted. |
