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发明名称
SUBSTRAT-HEIZAPPARATUR FUER DIE MOLEKULARSTRAHLEPITAXIE
摘要
申请公布号
DE3404780(A1)
申请公布日期
1984.08.16
申请号
DE19843404780
申请日期
1984.02.10
申请人
WESTERN ELECTRIC CO.,INC.
发明人
NG FINEGAN,SEAN;HOFFMAN MCFEE,JAMES;GERALD SWARTZ,ROBERT
分类号
H01L21/203;C30B23/06;(IPC1-7):C30B23/06;C30B35/00;H01J37/31;H01L21/20
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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