| 摘要 |
PURPOSE:To permit the mass production of the material having a uniform high quality by using an air bearing as the revolution shaft of a lapping surface plate and permitting a grinding cutting tool to be moved in silidable way by an air guide and permitting digital indicaton of the process relations. CONSTITUTION:Each peripheral speed of the inner and the outer periphery is made uniform by utilizing an air bearing for the revolution of a surface plate shaft 2, and the plane accuracy is unified, and each vibration in the radial and in the thrust directions can be reduced markedly. Further, a cutting tool 4 is moved in slidable ways in a delivery apparatus 3 by air, and the delicate griding pressurization is permitted. Each pressure degree for use is measured and stored, or is digitally indicated on a control dispay apparatus 5. Since the fine pressurization difference which can not be obtained manually can be controlled freely by a pressurizaton adjustor 6, and work is immediately digital-indicated, and the vibration of the surface plate can be suppressed extremely, the high flatness of a worked article can be obtained. |
