| 摘要 |
PURPOSE:To detect pressure change with good accuracy by preventing the excessive increase of the internal stress of a piezoelectric element, by providing a minute gap which disappears when force reaching a definite value or more is applied to a pressure receiving part between the pressure receiving part and a pressure detecting part. CONSTITUTION:A minute gap 40 is provided between the upper suface of a pressure detecting part 28 and the lower surface of a pressure detecting part 21. In addition, an insulating tube 29 is interposed between the inner peripheral surface of the pressure detecting part 28 and an inside gap holding part 23 and, by this structure, insulation between an electrode plate 27 and the pressure receiving parts 21, 22 are performed. By this constitution, the excessive increase of the internal stress of a piezoelectric element is prevented and a pressure changing component to be measured can be detected with good accuracy.
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