| 摘要 |
PURPOSE:To form a thin film of the resulting product of thermal decomposition having high quality without changing the structural function of a base body by ejecting gaseous flow of a reactive gaseous material to a substrate while irradiating a laser beam thereto and moving at the same time the substrate two- dimensionally. CONSTITUTION:A laser beam projector 3 is fixed above a sample base 2 provided with a two-dimensional driving mechanism 1, and a laser beam is made incident perpendicularly to the center A of the substrate 4 on the base 2. A reactive gaseous material is projected as fine and high velocity gaseous flow from pencil nozzles 5, 5 toward the incident point A. The base 2 is manipulated two-dimensionally in this state to form film surface and thin film pattern. All the points on the substrate 4 are heated instantaneously only on the extremely thin surface layer when they pass the irradiating point of the laser beam according to the movement in X-, Y directions and are quickly cooled after the passage thereof. The stage for manufacturing the thin film is thus executed at a lower temp. and the thin film having high quality and adhesion strength is formed. |
