THIN FILM STRUCTURE FOR CERAMIC SUBSTRATES

摘要

A thin film structure is provided with the capability of low-power laser tuning and trimming. Trim windows in a plated ground plane are incorporated to allow automated tuning procedures using relatively low-power lasers. The trim windows are conductive, but the heavier layer of plated copper is omitted from those areas, leaving only the titanium/evaporated copper/ gold layers. The method can also provide for areas of bare substrate if desired.