发明名称
摘要 PURPOSE:To prevent the reevaporation of evaporated metal, by cooling with cooling body, provided facing against the opposite face of evaporating face, at the time of continuously evaporating low melting point metal under vacuum on a continuous length, such as hoop etc.
申请公布号 JPS5932543(B2) 申请公布日期 1984.08.09
申请号 JP19770015301 申请日期 1977.02.15
申请人 MITSUBISHI HEAVY IND LTD 发明人 YAMAZAKI DAIZO;WADA TETSUYOSHI;ITANO SHIGEO;FURUKAWA HEIZABURO
分类号 C23C14/14;C23C14/54;C23C14/56 主分类号 C23C14/14
代理机构 代理人
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