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发明名称
SEMICONDUCTOR DEVICE MANUFACTURE
摘要
申请公布号
GB2089567(B)
申请公布日期
1984.08.08
申请号
GB19810037601
申请日期
1981.12.14
申请人
PHILIPS NV
发明人
分类号
H01L21/22;H01L21/331;H01L21/74;H01L21/761;H01L29/73;(IPC1-7):H01L21/22;H01L21/76
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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