发明名称 GAS SENSOR
摘要 An ammonia gas sensor comprises a dual gate field effect transistor (FET) in which the two gate electrodes are of platinum deposited respectively by sputtering and evaporation. The gate regions of the two FETs are connected together differentially and the net drain source voltage represents the concentration of ammonia gas to which the sensor is exposed.
申请公布号 GB8416994(D0) 申请公布日期 1984.08.08
申请号 GB19840016994 申请日期 1984.07.04
申请人 EMI LTD 发明人
分类号 H01L29/78;G01N27/00;G01N27/12;G01N27/414;G01N33/00;H01L29/423;H01L29/43;H01L29/49;(IPC1-7):G01N27/00 主分类号 H01L29/78
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