发明名称 WIRING LAYERS FOR SEMICONDUCTOR DEVICES
摘要 In a semiconductor device wherein a semiconductor substrate 2 is bonded to a metal layer 19 at the bottom of a recess in a ceramic package 1 and includes a substrate biasing circuit, a first wiring layer 7, 10%, of silicon containing aluminum, or polycrystalline silicon, is connected directly to a source 3 or drain 3 of an insulated gate field effect transistor in the biasing circuit and extends on to a field insulating film 5 on the substrate surface, and a second wiring layer 11 of pure aluminium contacts the first wiring layer on the insulating film and is directly connected to a connecting section of a scribe line region 21 of the substrate. This pure aluminium wiring layer makes a more stable contact with the substrate than the materials used for the first wiring layer. <IMAGE>
申请公布号 GB2068640(B) 申请公布日期 1984.08.08
申请号 GB19810002607 申请日期 1981.01.28
申请人 NIPPON ELECTRIC CO LTD 发明人
分类号 H01L21/822;H01L21/3205;H01L21/60;H01L23/498;H01L23/52;H01L23/532;H01L27/04 主分类号 H01L21/822
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